ISO 14606:2022

Surface chemical analysis — Sputter depth profiling — Optimization using layered systems as reference materials
Autor: ISO
Código ICS: 71.040.40


This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.This document is not intended to cover the use of special multilayered systems such as delta doped layers.

Especificaciones de la Norma
Fecha de Publicación 21/11/2022
Título Secundario Analyse chimique des surfaces — Profilage d'épaisseur par bombardement — Optimisation à l'aide de systèmes mono- ou multicouches comme matériaux de référence
Páginas Técnicas 17
Idioma Inglés