ISO 22278:2020

Fine ceramics (advanced ceramics, advanced technical ceramics) -- Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
Autor: ISO
Código ICS: 81.060.30
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This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

Especificaciones de la Norma
Fecha de Publicación 24/08/2020
Título Secundario Titre manque
Páginas Técnicas 29
Idioma Inglés