ISO 23131:2021

Ellipsometry -- Principles
Autor: ISO
Código ICS: 17.020


This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

Especificaciones de la Norma
Fecha de Publicación 22/04/2021
Título Secundario Ellipsométrie -- Principes
Páginas Técnicas 15
Idioma Inglés