ISO 23216:2021

Carbon based films -- Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
Autor: ISO
Código ICS: 25.220.99


This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

Especificaciones de la Norma
Fecha de Publicación 04/05/2021
Título Secundario Films à base de carbone -- Détermination des propriétés optiques des films de carbone amorphe par ellipsométrie spectroscopique
Páginas Técnicas 7
Idioma Inglés