ISO 24688:2022

Determination of modulation period of nano-multilayer coatings by low-angle X-ray methods
Autor: ISO
Código ICS: 25.220.01
Vigente
$94.010

Alcance

This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).

Especificaciones de la Norma
Fecha de Publicación 22/07/2022
Título Secundario Titre manque
Páginas Técnicas 8
Idioma Inglés