ISO/TR 15969:2021

Surface chemical analysis -- Depth profiling -- Measurement of sputtered depth
Autor: ISO
Código ICS: 71.040.40


This document provides guidelines for measuring the sputtered depth in sputtered depth profiling. 

The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 µm.

Especificaciones de la Norma
Fecha de Publicación 17/03/2021
Título Secundario Analyse chimique des surfaces -- Profilage d'épaisseur -- Mesurage de l'épaisseur bombardée
Páginas Técnicas 13
Idioma Inglés